Non-Destructive Characterization of Nitrogen-Implanted Silicon-On-Insulator Structures by Spectroscopic Ellipsometry

Materials Science & Engineering B: Solid-State Materials for Advanced Technology - United Kingdom
doi 10.1016/0921-5107(89)90087-1
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Elsevier BV

Related search

Determination of Complex Dielectric Functions of Ion Implanted and Implanted‐annealed Amorphous Silicon by Spectroscopic Ellipsometry

Journal of Applied Physics
AstronomyPhysics
1992English

Strained Silicon-On-Insulator - Fabrication and Characterization

2007English

Characterization of the SEI on a Carbon Film Electrode by Combined EQCM and Spectroscopic Ellipsometry

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2003English

Role of an Oxidant Mixture as Surface Modifier of Porous Silicon Microstructures Evaluated by Spectroscopic Ellipsometry

Scientific Reports
Multidisciplinary
2016English

Non-Destructive Test of Steel Structures by Conical Indentation

MATEC Web of Conferences
Materials ScienceEngineeringChemistry
2017English

Applications of Subwavelength Grating Structures in Silicon-On-Insulator Waveguides

2010English

Analysis of Controlled Mixed-Phase (Amorphous+microcrystalline) Silicon Thin Films by Real Time Spectroscopic Ellipsometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2009English

Imaging by Silicon on Insulator Waveguides

Applied Physics Letters
AstronomyPhysics
2009English

Experimental Investigation of Self-Assembled Opal Structures by Atomic Force Microscopy, Spectroscopic Ellipsometry and Reflectometry

Journal of Self-Assembly and Molecular Electronics (SAME)
2013English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy