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Evolution of Electron Temperature in Inductively Coupled Plasma

Applied Physics Letters - United States
doi 10.1063/1.4971980
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Abstract

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Categories
AstronomyPhysics
Date

January 4, 2017

Authors
Hyo-Chang LeeB. H. SeoDeuk-Chul KwonJ. H. KimD. J. SeongS. J. OhC.-W. ChungK. H. YouChaeHo Shin
Publisher

AIP Publishing


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