Planar Surface-Micromachined Pressure Sensor With a Subsurface, Embedded Reference Pressure Cavity

doi 10.1117/12.250711
Full Text
Abstract

Available in full text

Date
Authors
Publisher

SPIE

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy