Effect of Ion Bombardment on the Chemical and the Mechanical Properties of Silicon-Nitride Thin Films Deposited by Using PECVD With SiH4/NH3/Ar Gases at Low Temperature

Journal of the Korean Physical Society - South Korea
doi 10.3938/jkps.51.1934
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Korean Physical Society

Related search

Properties of Silicon Dioxide Film Deposited by PECVD at Low Temperature/Pressure

Metallurgical and Materials Engineering
AlloysMetalsMechanical Engineering
2014English

Correlation Between Mechanical and Microstructural Properties of Molybdenum Nitride Thin Films Deposited on Silicon by Reactive R.F. Magnetron Discharge

Surface and Coatings Technology
SurfacesCondensed Matter PhysicsInterfacesMaterials ChemistryFilmsCoatingsChemistry
2018English

Effect of Hydrogen Content and Bonding Environment on Mechanical Properties of Hydrogenated Silicon Films Deposited by High-Frequency PECVD Process

ISRN Nanomaterials
2012English

High-Performance Thin H:SiON OLED Encapsulation Layer Deposited by PECVD at Low Temperature

RSC Advances
ChemistryChemical Engineering
2019English

Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

Journal of Applied Sciences
2017English

Effect of Annealing Temperature on Optical and Electrical Properties of Metallophthalocyanine Thin Films Deposited on Silicon Substrate

Materials Science-Poland
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2016English

Investigation of Optical Properties of Silicon Oxynitride Films Deposited by RF PECVD Method

Materials Science-Poland
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2016English

Nanostructural Characterization of CrN and CO Thin Films on Silicon Substrate, Modified by Ion Bombardment

English

Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
1999English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy