Monolithic Fringe-Field-Activated Crystalline Silicon Tilting-Mirror Devices

Journal of Microelectromechanical Systems - United States
doi 10.1109/jmems.2003.818068
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Related search

On Monolithic Silicon Array Detectors for Small-Field Photon Beam Dosimetry

IEEE Transactions on Nuclear Science
Electronic EngineeringNuclearNuclear EnergyHigh Energy PhysicsEngineeringElectrical
2018English

Silicon Nanocrystal Field-Effect Light-Emitting Devices

IEEE Journal of Selected Topics in Quantum Electronics
ElectricalElectronic EngineeringOpticsAtomicMolecular Physics,
2006English

Calculation of Defect Densities in Nano-Crystalline and Amorphous Silicon Devices Using Differential Capacitance Measurements

English

Progress and Challenges in the Direct Monolithic Integration of III–V Devices and Si CMOS on Silicon Substrates

2009English

Conjugated Polymers Inspired by Crystalline Silicon

Chemistry of Materials
Materials ChemistryChemistryChemical Engineering
2019English

Ion Damage Calculations in Crystalline Silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
High Energy PhysicsInstrumentationNuclear
1986English

Mirror Polishing of Silicon Wafers (4th Report)

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
1993English

Crystalline-Silicon Photovoltaics: Necessary and Sufficient

English

Enhanced Optical Response of Crystalline Silicon Photovoltaic Devices With Integration of Silver Nanoparticles and Ultrathin TiO2 Dielectric Layer

AIP Advances
NanotechnologyAstronomyPhysicsNanoscience
2018English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy