Determination of the Metallic-Impurity Distribution on a Silicon Wafer by the Multiple Indicator-Rod Method for Liquid-Phase Dissolution and Graphite-Furnace AAS.
Bunseki Kagaku - Japan
doi 10.2116/bunsekikagaku.46.375
Full Text
Open PDFAbstract
Available in full text
Categories
Date
January 1, 1997
Authors
Publisher
Japan Society for Analytical Chemistry