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Integrated Micro-Electro-Mechanical Sensor Development for Inertial Applications
doi 10.1109/plans.1998.669863
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Date
Unknown
Authors
J.J. Allen
R.D. Kinney
J. Sarsfield
M.R. Daily
J.R. Ellis
J.H. Smith
S. Montague
R.T. Howe
B.E. Boser
R. Horowitz
A.P. Pisano
M.A. Lemkin
W.A. Clark
C.T. Juneau
Publisher
IEEE
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