Amanote Research

Amanote Research

    RegisterSign In

Atomic Order Flattening of Hydrogen-Terminated Si(110) Substrate for Next Generation ULSI Devices

doi 10.7567/ssdm.2003.p3-5
Full Text
Open PDF
Abstract

Available in full text

Date

January 1, 2003

Authors
Hiroshi AkahoriKeiichi NiiAkinobu TeramotoShigetoshi SugawaTadahiro Ohmi
Publisher

The Japan Society of Applied Physics


Related search

Oxidation of Hydrogen-Terminated Si Surfaces.

Hyomen Kagaku
1992English

Refractory Metal/Si Substrate Interfacial Reactions During ULSI Processing.

Materia Japan
1996English

Carrier Transport Characteristics of H-Terminated Diamond Films Prepared Using Molecular Hydrogen and Atomic Hydrogen

International Journal of Minerals, Metallurgy and Materials
Mechanics of MaterialsAlloysMechanical EngineeringPetrologyMetalsGeochemistryMaterials Chemistry
2017English

Next Generation Hybrid Nanofiber Based Electrochromic Devices

Academic Perspective Procedia
2018English

Microstructural Observation of Next-Generation Strained Si-Sgoi Wafer

Materia Japan
2005English

Towards Next Generation Time-Domain Diffuse Optics Devices

2015English

Silicon-Germanium Composition Engineering for Next Generation Multilayer Devices and Systems

2014English

Self-Healing Materials for Next-Generation Energy Harvesting and Storage Devices

Advanced Energy Materials
Materials Sciencethe EnvironmentSustainabilityRenewable Energy
2017English

Atomically Resolved Scanning Tunneling Microscopy of Hydrogen-Terminated Si(001) Surfaces After HF Cleaning

Applied Physics Letters
AstronomyPhysics
2000English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy