Basic Study on Differential Pumping Seal for Precision Positioning Table in Vacuum Environment

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C - Japan
doi 10.1299/kikaic.71.3067
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Japan Society of Mechanical Engineers

Related search

Multi-GNSS Dynamic High Precision Positioning in Urban Environment

2017English

Vacuum Pumping System for TPX

English

Vacuum Pumping System for Pressure Modulation.

SHINKU
1994English

Vacuum Pumping by Cryosorption

1962English

Experimental Positioning Error Study on a Cartesian CNC Table

Contemporary Engineering Sciences
Materials ScienceMutagenesisComputer NetworksFluid FlowCommunicationsEngineeringHealthTransfer ProcessesToxicologySocial Sciences
2018English

Effect of Adsorbed Water Molecule on Vacuum Pumping Process

Journal of the Vacuum Society of Japan
SurfacesInstrumentationInterfacesSpectroscopyMaterials Science
2010English

Fundamental Study on Oil Leakage From Tapered Seal at Ends of Fluid Film Bearing for Precision Equipments

Journal of Environment and Engineering
2011English

Adaptronic Precision Positioning Technology

2009English

One Design Procedure for Precision Positioning Mechanisms.

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
1988English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy