Observation of Al-Lines in LSI Devices by Ultra-High Voltage Electron Microscope

Microscopy Microanalysis Microstructures

doi 10.1051/mmm:0199300402-3023900

Full Text

Abstract

Available in

Date

January 1, 1993

Authors

Publisher

EDP Sciences

Related search

A Stereoscope Observation of Tracheal Epithelium of Mouse by Means of the High Voltage Electron Microscope

Journal of Cell Biology

English

In-Situ Experiment With High Voltage Electron Microscope

Materials Transactions, JIM

English

Studies on Atom Clusters by Ultra-High Voltage Electron Microscopy

Materials Transactions, JIM

English

Microsecond Temporal Resolution in Situ Ultra-High Voltage Electron Microscopy Observation of Crystallization in Amorphous Antimony Nanoparticles

English

The Importance of Ultra-High Voltage Electron Microscopy in Materials Science

Proceedings of the Japan Academy Series B: Physical and Biological Sciences

Multidisciplinary

Biological Sciences

English

Development and Application of Intermittent Electron Irradiation Technique With a High Voltage Electron Microscope

Microscopy Microanalysis Microstructures

English

High Voltage MOSFETs Using Submicron LSI Process

English

Horizontal Incidence Observation of Magnetic Field by Scanning Electron Microscope.

Journal of the Magnetics Society of Japan

English

Observation of the Fine Structure of Manganese Compounds by Electron Microscope.

NIPPON KAGAKU KAISHI

English