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Characterization of Nanodevices by STEM Tomography
doi 10.1063/1.3657873
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Date
January 1, 2011
Authors
O. Richard
A. Vandooren
G. S. Kar
P. Van Marcke
H. Bender
David G. Seiler
Alain C. Diebold
Robert McDonald
Amal Chabli
Erik M. Secula
Publisher
AIP
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