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Air Damping Characteristics of Integrated Accelerometers With a Single-Side Air Gap.
IEEJ Transactions on Sensors and Micromachines
- Japan
doi 10.1541/ieejsmas.117.75
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Categories
Electronic Engineering
Electrical
Mechanical Engineering
Date
January 1, 1997
Authors
H. Muro
S. Kiyota
S. Uchikoshi
R. Himeno
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
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