Stress and Adhesion of CVD Grown Polycrystalline 3C–SiC Films on Silicon Substrates

Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering
doi 10.17073/1609-3577-2012-4-24-27
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National University of Science and Technology MISiS

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