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Reliability Overview of RF MEMS Devices and Circuits
doi 10.1109/euma.2003.340820
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Date
October 1, 2003
Authors
S. Melle
F. Flourens
D. Dubuc
K. Grenier
P. Pons
F. Pressecq
J. Kuchenbecker
J.L. Muraro
L. Bary
R. Plana
Publisher
IEEE