Precision Analysis of Electron Beam Lithography

IEEJ Transactions on Electronics, Information and Systems - Japan
doi 10.1541/ieejeiss.126.683
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Related search

Electron Beam Lithography System.

Journal of the Japan Society of Precision Engineering
1985English

Multiple-Beam Interference Lithography With Electron Beam Written Gratings

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2002English

Three-Dimensional in Situ Electron Beam Lithography Using Water Ice

Nano Letters
Materials ScienceCondensed Matter PhysicsMechanical EngineeringNanoscienceBioengineeringNanotechnologyChemistry
2018English

Effects of Fast Secondary Electrons to Low-Voltage Electron Beam Lithography

Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic EngineeringCondensed Matter PhysicsMechanical EngineeringElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsNanotechnologyOptics
2007English

Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies

2019English

Nanodevice Fabrication Technologies With Advanced High Resolution Electron Beam Lithography Systems

Nanoindustry Russia
2015English

Analytic Estimation and Minimization of Line Edge Roughness in Electron-Beam Lithography

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2015English

Precision Electron Beam Polarimetry for Next Generation Nuclear Physics Experiments

International Journal of Modern Physics E
High Energy PhysicsNuclearAstronomyPhysics
2018English

Electron Beam Lithography Using GaAs Oxidized Resist for GaAs/AlGaAs Ultrafine Structure Fabrication.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1994English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy