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Island Coalescence During Film Growth: An Underestimated Limitation of Cu ALD

Advanced Materials Interfaces - United Kingdom
doi 10.1002/admi.201700274
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Abstract

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Categories
Mechanics of MaterialsMechanical Engineering
Date

May 31, 2017

Authors
Dirk J. HagenJames ConnollyIan M. PoveySimon RushworthMartyn E. Pemble
Publisher

Wiley


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