(PDF) A Flexible Nanobrush Pad for the Chemical Mechanical

A Flexible Nanobrush Pad for the Chemical Mechanical Planarization of Cu/Ultra-Low-К Materials

Nanoscale Research Letters - Germany

doi 10.1186/1556-276x-7-603

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Abstract

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Categories

Materials Science

Condensed Matter Physics

Date

January 1, 2012

Authors

Publisher

Springer Science and Business Media LLC

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