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On the Determination of Etching (Or Growth) Rates of Single Crystals
doi 10.1115/imece2008-66867
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Date
January 1, 2008
Authors
Chia-Ou Chang
Wen-Tien Chang Chien
Guo-En Chang
Po-Chih Chen
Fa-Hwa Shieh
Publisher
ASMEDC
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