Chemical Sputtering of A-C:h Films by Simultaneous Exposure to Energetic Ar+ions and Water Vapor

Journal of Physics: Conference Series - United Kingdom
doi 10.1088/1742-6596/100/6/062012
Full Text
Abstract

Available in full text

Date
Authors
Publisher

IOP Publishing

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy