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Understanding the Effect of Laser Anneal on LSTP 45nm Node MOS Transistor Electrical Parameters
doi 10.7567/ssdm.2008.b-8-2
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Date
September 26, 2008
Authors
A. Cros
S. Renard
M. Bidaud
R. Ranica
G. Ribes
E. Josse
B. Dumont
R. Beneyton
K. Barla
M. Haond
H. Brut
Publisher
The Japan Society of Applied Physics
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