Numerical Investigation of the Kinetics and Chemistry of Rf Glow Discharge Plasmas Sustained in He, N2, O2, He/N2/O2, He/Cf4/O2, and SiH4/NH3using a Monte Carlo‐fluid Hybrid Model
Journal of Applied Physics - United States
doi 10.1063/1.351196
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Date
February 15, 1992
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AIP Publishing