Formation Process of Tantalum Nitride by the Reaction of Tantalum Pentachloride With Ammonia in the Vapor Phase and Properties of the Tantalum Nitride Formed
Denki Kagaku oyobi Kogyo Butsuri Kagaku
doi 10.5796/kogyobutsurikagaku.51.676
Full Text
Open PDFAbstract
Available in full text
Date
August 5, 1983
Authors
Publisher
The Electrochemical Society of Japan