(PDF) Quality Improvement of Plasma-Beam-Deposited

Quality Improvement of Plasma-Beam-Deposited Amorphous Hydrogenated Carbon With Higher Growth Rate

Plasma Sources Science and Technology - United Kingdom

doi 10.1088/0963-0252/5/3/016

Full Text

Abstract

Available in full text

Categories

Condensed Matter Physics

Date

August 1, 1996

Authors

M C M van de Sanden

P R M Kleuskens

Publisher

IOP Publishing

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