Spectroscopic Measurements of the Electron Temperature in Low Pressure Radiofrequency Ar/H2/C2H2and Ar/H2/CH4plasmas Used for the Synthesis of Nanocarbon Structures
Plasma Sources Science and Technology- United Kingdom
doi 10.1088/0963-0252/15/1/007
Full Text
Abstract
Available in
Categories
Date
December 2, 2005
Authors
Publisher
IOP Publishing