(PDF) A Basic Study on Defect Inspection Method for ASIC

A Basic Study on Defect Inspection Method for ASIC Manufacturing Line (Second Report: Inspection Parameter Dependence on Yield and Cleaning Cycle)

IEEJ Transactions on Industry Applications - Japan

doi 10.1541/ieejias.123.492

Full Text

Abstract

Available in full text

Categories

Electronic Engineering

Manufacturing Engineering

Date

January 1, 2003

Authors

Toshiya Kaihara

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

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