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Measurements of Anisotropic Biaxial Stresses in X = 0.15 and 0.30 Si1-xGex Nanostructures by Oil-Immersion Raman Spectroscopy
doi 10.7567/ssdm.2012.d-8-1
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Date
September 27, 2012
Authors
D. Kosemura
M. Tomita
K. Usuda
T. Tezuka
A. Ogura
Publisher
The Japan Society of Applied Physics
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