Bulk and Surface-Related Degradation in Lifetime Samples Made of Czochralski Silicon Passivated by Plasma-Enhanced Chemical Vapor Deposited Layer Stacks

Physica Status Solidi (A) Applications and Materials Science - Germany
doi 10.1002/pssa.201800741
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Wiley

Related search

Addendum to "Effective GaN Surface Passivation by Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide"

International Journal of Nanoscience
Materials ScienceCondensed Matter PhysicsElectronic EngineeringNanoscienceComputer Science ApplicationsElectricalBioengineeringBiotechnologyNanotechnology
2012English

Gallium Assisted Plasma Enhanced Chemical Vapor Deposition of Silicon Nanowires

Nanotechnology
Mechanics of MaterialsElectronic EngineeringMechanical EngineeringMaterials ScienceNanoscienceElectricalBioengineeringNanotechnologyChemistry
2009English

Silicon Surface Passivation by Atomic Layer Deposited Al2O3

Journal of Applied Physics
AstronomyPhysics
2008English

Forming Silicon Carbon Nitride Crystals and Silicon Carbon Nitride Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition

Applied Physics Letters
AstronomyPhysics
2002English

Electrical and Mechanical Properties of Si-B-N Films Made by Plasma-Enhanced Chemical Vapor Deposition.

Transactions of the Japan Society of Mechanical Engineers Series A
1996English

Control of Crystallinity in Nanocrystalline Silicon Prepared by High Working Pressure Plasma-Enhanced Chemical Vapor Deposition

Advances in Materials Science and Engineering
Materials ScienceEngineering
2012English

BO-Related Defects: Overcoming Bulk Lifetime Degradation in Crystalline Si by Regeneration

Solid State Phenomena
Materials ScienceCondensed Matter PhysicsOpticsAtomicMolecular Physics,
2015English

Characteristics of Diamondlike Carbon Film Deposited by Magnetron Plasma Enhanced Chemical Vapor Deposition Using a Roll Coater.

SHINKU
2000English

Silicon Diffusion Control in Atomic-Layer-Deposited Al2O3/La2O3/Al2O3 Gate Stacks Using an Al2O3 Barrier Layer

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2015English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy