(PDF) Multiple Patterning of Laser Focus Spot Using a

Multiple Patterning of Laser Focus Spot Using a Segmented Kinoform Phase Plate

The Review of Laser Engineering

doi 10.2184/lsj.32.265

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Abstract

Available in full text

Date

January 1, 2004

Authors

Koji TSUBAKIMOTO

Publisher

Laser Society of Japan

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