Mixture of ZEP and PMMA With Varying Ratios for Tunable Sensitivity as a Lift-Off Resist With Controllable Undercut
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics - United States
doi 10.1116/1.4967932
Full Text
Open PDFAbstract
Available in full text
Categories
Date
November 1, 2016
Authors
Publisher
American Vacuum Society