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Transmission Electron Microscopy Studies of (AIN-Si3N4) Codeposits Obtained by LPCVD
Le Journal de Physique IV
doi 10.1051/jphyscol:19955107
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Date
June 1, 1995
Authors
P. Marti
F. Henry
A. Mazel
B. Armas
J. Sevely
Publisher
EDP Sciences