Establishment of the Feasibility of a Process Capable of Low-Cost, High-Volume Production of Silane (Step I) and the Pyrolysis of Silane to Semiconductor-Grade Silicon (Step II). Low Cost Silicon Solar Array Project, Silicon Materials Task. Quarterly Progress Report, July--September 1977
doi 10.2172/5100763
Full Text
Open PDFAbstract
Available in full text
Date
January 1, 1978
Authors
Publisher
Office of Scientific and Technical Information (OSTI)