Amanote Research
Register
Sign In
Phase Tailoring of Tantalum Thin Films Deposited in Deep Oscillation Magnetron Sputtering Mode
doi 10.14332/svc16.proc.0053
Full Text
Open PDF
Abstract
Available in
full text
Date
January 1, 2016
Authors
Unknown
Publisher
Society of Vacuum Coaters
Related search
AlNxOy Thin Films Deposited by DC Reactive Magnetron Sputtering
Applied Surface Science
Surfaces
Astronomy
Condensed Matter Physics
Interfaces
Films
Coatings
Chemistry
Physics
Intense Photoluminescence From Erbium-Doped Tantalum Oxide Thin Films Deposited by Sputtering
IEICE Electronics Express
Electronic Engineering
Condensed Matter Physics
Optical
Electrical
Magnetic Materials
Electronic
Structural and Nanomechanical Properties of BiFeO3 Thin Films Deposited by Radio Frequency Magnetron Sputtering
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Deuterium Retention in Tungsten Films Deposited by Magnetron Sputtering
Physica Scripta
Condensed Matter Physics
Optics
Molecular Physics,
Mathematical Physics
Atomic
Astronomy
Physics
Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering
Cathodoluminescence Study of Gadolinium–Doped Yttrium Oxide Thin Films Deposited by Radio–Frequency Magnetron Sputtering
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Structural Analysis of Ferromagnetic Mn-Doped ZnO Thin Films Deposited by Radio Frequency Magnetron Sputtering
Journal of Applied Physics
Astronomy
Physics
Deposition of Yttria-Stabilized Zirconia Thin Films by High Power Impulse Magnetron Sputtering and Pulsed Magnetron Sputtering
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
Chemistry
Synthesis of ZnO:N Thin Films by Reactive Dc Magnetron Sputtering
Lithuanian Journal of Physics
Astronomy
Physics