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Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen, Volker Saile, and Jürg Leuthold
MRS Bulletin
- United Kingdom
doi 10.1557/mrs.2015.253
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Abstract
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Categories
Materials Science
Theoretical Chemistry
Condensed Matter Physics
Physical
Date
October 1, 2015
Authors
Unknown
Publisher
Cambridge University Press (CUP)