Polymer as the Protecting Passivaton Layer in Fabricating Suspended SCS Structures in Both Anisotropic and Isotropic Etching
Journal of Micromechanics and Microengineering - United Kingdom
doi 10.1088/0960-1317/22/4/045015
Full Text
Open PDFAbstract
Available in full text
Categories
Date
March 15, 2012
Authors
Publisher
IOP Publishing