Control of Ti1−xSixN Nanostructure via Tunable Metal-Ion Momentum Transfer During HIPIMS/DCMS Co-Deposition
Surface and Coatings Technology - Netherlands
doi 10.1016/j.surfcoat.2015.09.001
Full Text
Open PDFAbstract
Available in full text
Date
October 1, 2015
Authors
Publisher
Elsevier BV