Amanote Research
Register
Sign In
Comparison of Magnetron Sputtering and Ion Beam Sputtering on Dispersive Mirrors
Applied Physics B: Lasers and Optics
- Germany
doi 10.1007/s00340-020-07431-6
Full Text
Open PDF
Abstract
Available in
full text
Categories
Astronomy
Physics
Date
April 15, 2020
Authors
Y. Chen
D. Hahner
M. Trubetskov
S. Schrameyer
W. Sakiew
K. Starke
V. Pervak
Publisher
Springer Science and Business Media LLC
Related search
Modeling Evaporation, Ion-Beam Assist, and Magnetron Sputtering of TiO2 Thin Films Over Realistic Timescales
Journal of Materials Research
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Study of Plasma and Ion Beam Sputtering Processes
Journal of Physical Science and Application
Evolution of Surface Morphology During Focused Ion Beam Sputtering and Gas-Assisted Sputtering Processes
Microscopy and Microanalysis
Instrumentation
Deposition of Yttria-Stabilized Zirconia Thin Films by High Power Impulse Magnetron Sputtering and Pulsed Magnetron Sputtering
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
Chemistry
Effect of Sputtering Power on Microstucture and Electrochemical Characteristic of Nickel Films Deposited by Magnetron Sputtering
DEStech Transactions on Materials Science and Engineering
Evolution of Sputtering Target Surface Composition in Reactive High Power Impulse Magnetron Sputtering
Journal of Applied Physics
Astronomy
Physics
Simulation of Ion Beam Sputtering With SDTrimSP, TRIDYN and SRIM
Applied Surface Science
Surfaces
Astronomy
Condensed Matter Physics
Interfaces
Films
Coatings
Chemistry
Physics
High Power Impulse Magnetron Sputtering Discharge
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Effects of Crystallographic and Geometric Orientation on Ion Beam Sputtering of Gold Nanorods
Scientific Reports
Multidisciplinary