Atomic Imaging of Atomic Layer Deposition Oxide Nucleation With Trimethylaluminum on As-Rich InGaAs(001) 2 × 4 vs Ga/in-Rich InGaAs(001) 4 × 2
Journal of Chemical Physics - United States
doi 10.1063/1.4704126
Full Text
Open PDFAbstract
Available in full text
Date
April 21, 2012
Authors
Publisher
AIP Publishing