3D Micro-Fabrication Using Combination Technique of Nano-Scale Processing and Chemical Etching(1st Report, Possibility of 3D Micro-Fabrication Using the Mechanism of Friction Force Microscope)

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C - Japan
doi 10.1299/kikaic.70.2533
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Japan Society of Mechanical Engineers

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