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High-Sensitivity NIR Photodiodes Using Black Silicon
doi 10.1117/12.2544756
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Date
March 3, 2020
Authors
Juha Heinonen
Antti Haarahiltunen
Michael Dov Serue
Ville Vähänissi
Toni P. Pasanen
Hele I. Savin
Lutz Werner
Mikko A. Juntunen
Publisher
SPIE
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