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Packageless Temperature Sensor Based on AlN/IDT/ZnO/Silicon Layered Structure
doi 10.1109/eftf-ifc.2013.6702265
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Date
July 1, 2013
Authors
O. Legrani
O. Elmazria
M. Elhosni
A. Bartasyte
P. Pigeat
S. Zghoon
Publisher
IEEE
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