Catalytic Carbon Submicron Fabrication Using Home-Built Very-High Frequency Plasma Enhanced Chemical Vapour Deposition
ITB Journal of Sciences
doi 10.5614/itbj.sci.2008.40.2.6
Full Text
Open PDFAbstract
Available in full text
Date
January 1, 2008
Authors
Publisher
The Institute for Research and Community Services (LPPM) ITB