(PDF) High Speed Deposition of Y2O3 Films by Laser-Assisted

High Speed Deposition of Y2O3 Films by Laser-Assisted Chemical Vapor Deposition

Materials Transactions - Japan

doi 10.2320/matertrans.46.2114

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Abstract

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Categories

Mechanics of Materials

Materials Science

Condensed Matter Physics

Mechanical Engineering

Date

January 1, 2005

Authors

Publisher

Japan Institute of Metals

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