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Application of GISAXS to the Microstructural Evaluation of Semiconductor and Metallic Materials
Transactions of the Materials Research Society of Japan
doi 10.14723/tmrsj.33.529
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Date
January 1, 2008
Authors
H. Okuda
K. Kuno
M. Ohtaka
S. Ochiai
K. Ito
S. Sasaki
M. Tabuchi
Y. Takeda
Publisher
The Materials Research Society of Japan
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