Effects of Ion Bombardment on Properties of d.c. Sputtered Superhard (Ti, Si, Al)N Nanocomposite Coatings
Surface and Coatings Technology - Netherlands
doi 10.1016/s0257-8972(01)01578-x
Full Text
Open PDFAbstract
Available in full text
Date
March 1, 2002
Authors
Publisher
Elsevier BV