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Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness
Measurement Science Review
- Slovakia
doi 10.1515/msr-2015-0034
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Categories
Control
Systems Engineering
Biomedical Engineering
Instrumentation
Date
October 1, 2015
Authors
Q. Liang
W. Wu
D. Zhang
B. Wei
W. Sun
Y. Wang
Y. Ge
Publisher
Walter de Gruyter GmbH