Amanote Research
Register
Sign In
Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit
doi 10.1117/12.2199169
Full Text
Open PDF
Abstract
Available in
full text
Date
October 21, 2015
Authors
Ronald Dixson
Ryan S. Goldband
Ndubuisi G. Orji
Publisher
SPIE