Controlling Pressure in Microsystem Packages by On-Chip Microdischarges Between Thin-Film Titanium Electrodes

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
doi 10.1116/1.2782510
Full Text
Abstract

Available in full text

Date
Authors
Publisher

American Vacuum Society

Related search

Conductometric Sensor Based on Nanostructured Titanium Oxide Thin Film Deposited on Polyimide Substrate With Dissimilar Metallic Electrodes

2008English

A Fluid Actuator for Thin-Film Electrodes

Journal of Medical Devices, Transactions of the ASME
MedicineBiomedical Engineering
2006English

MnO2 Thin Film Electrodes for Enhanced Reliability of Thin Glass Capacitors

Journal of the American Ceramic Society
CompositesMaterials ChemistryCeramics
2018English

Germanium Thin Film Formation by Low-Pressure Chemical Vapor Deposition

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
1997English

Thin Film Deposition by Means of Atmospheric Pressure Microplasma Jet

Plasma Physics and Controlled Fusion
EngineeringNuclear EnergyCondensed Matter Physics
2007English

Formation of Titanium Monoxide (001) Single-Crystalline Thin Film Induced by Ion Bombardment of Titanium Dioxide (110)

Nature Communications
AstronomyGeneticsMolecular BiologyBiochemistryChemistryPhysics
2015English

Assuring Ultra-Clean Environments in Microsystem Packages : Irreversible and Reversible Getters.

2003English

Nano-Periodic Structure Formation on Titanium Thin Film With a Femtosecond Laser

Journal of the Ceramic Society of Japan
Materials ChemistryChemistryCondensed Matter PhysicsCompositesCeramics
2011English

Controlling the Dimensionality of Charge Transport in Organic Thin-Film Transistors

Proceedings of the National Academy of Sciences of the United States of America
Multidisciplinary
2011English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy