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Outgassing Rate and Morphology of Surface Oxide Layer of Aluminum Alloy for Vacuum Equipment Use.

SHINKU
doi 10.3131/jvsj.43.209
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Abstract

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Date

January 1, 2000

Authors
Sonoko TSUKAHARASakae INAYOSHIYoshirou OOTSUKAShunji MISAWAAkihiro TANAKA
Publisher

The Vacuum Society of Japan


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