So, You Want to Have a Nanofab? Shared-Use Nanofabrication and Characterization Facilities: Cost-Of-Ownership, Toolset, Utilization, and Lessons Learned
Journal of Research of the National Institute of Standards and Technology
doi 10.6028/jres.125.009
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Date
February 21, 2020
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National Institute of Standards and Technology (NIST)