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Maskless Fabrication of Highly-Ordered Periodic Nanopillars Using FIB and Bitmap Control
Microscopy and Microanalysis
- United Kingdom
doi 10.1017/s1431927605508924
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Abstract
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Categories
Instrumentation
Date
August 1, 2005
Authors
W Zhou
H Qian
L Wang
Publisher
Cambridge University Press (CUP)
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